Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6902629 | Method for cleaning a process chamber | Vinita Singh, Srinivas D. Nemani, Chen-An Chen, Ju-Hyung Lee, Shankar Venkataraman | 2005-06-07 |
| 6890850 | Method of depositing dielectric materials in damascene applications | Ju-Hyung Lee, Ping Xu, Shankar Venkataraman, Li-Qun Xia, Fei Han +5 more | 2005-05-10 |