Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899763 | Lid cooling mechanism and method for optimized deposition of low-K dielectric using TR methylsilane-ozone based processes | Himansu Pokharna, Li-Qun Xia | 2005-05-31 |
| 6858923 | Post-deposition treatment to enhance properties of Si-O-C low films | Li-Qun Xia, Frederic Gaillard, Ellie Yieh | 2005-02-22 |