Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899763 | Lid cooling mechanism and method for optimized deposition of low-K dielectric using TR methylsilane-ozone based processes | Li-Qun Xia, Tian-Hoe Lim | 2005-05-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899763 | Lid cooling mechanism and method for optimized deposition of low-K dielectric using TR methylsilane-ozone based processes | Li-Qun Xia, Tian-Hoe Lim | 2005-05-31 |