Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6853043 | Nitrogen-free antireflective coating for use with photolithographic patterning | Sang-Hoon Ahn, Christopher Dennis Bencher, Hichem M'Saad, Sudha Rathi | 2005-02-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6853043 | Nitrogen-free antireflective coating for use with photolithographic patterning | Sang-Hoon Ahn, Christopher Dennis Bencher, Hichem M'Saad, Sudha Rathi | 2005-02-08 |