Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6858153 | Integrated low K dielectrics and etch stops | Claes Bjorkman, Hongquing Shan, David Cheung, Wai-Fan Yau, Kuowei Liu +7 more | 2005-02-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6858153 | Integrated low K dielectrics and etch stops | Claes Bjorkman, Hongquing Shan, David Cheung, Wai-Fan Yau, Kuowei Liu +7 more | 2005-02-22 |