Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6967072 | Photolithography scheme using a silicon containing resist | Ian Latchford, Christopher Dennis Bencher, Yuxiang Wang | 2005-11-22 |
| 6927178 | Nitrogen-free dielectric anti-reflective coating and hardmask | Bok Hoen Kim, Sudha Rathi, Sang-Hoon Ahn, Christopher Dennis Bencher, Yuxiang Wang +4 more | 2005-08-09 |