Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6955197 | Substrate carrier having door latching and substrate clamping mechanisms | Martin R. Elliott, Robert B. Lowrance, Jeffrey C. Hudgens, Eric A. Englhardt | 2005-10-18 |
| 6841341 | Method of depositing an amorphous carbon layer | Kevin Fairbairn, Timothy Weidman, Christopher S. Ngai, Ian Latchford, Christopher Dennis Bencher +1 more | 2005-01-11 |