Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6890403 | Apparatus and process for controlling the temperature of a substrate in a plasma reactor | Alexandros T. Demos | 2005-05-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6890403 | Apparatus and process for controlling the temperature of a substrate in a plasma reactor | Alexandros T. Demos | 2005-05-10 |