Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6900596 | Capacitively coupled plasma reactor with uniform radial distribution of plasma | Daniel J. Hoffman, James D. Carducci, Douglas A. Buchberger, Jr., Matthew L. Miller, Kang-Lie Chiang +2 more | 2005-05-31 |
| 6853141 | Capacitively coupled plasma reactor with magnetic plasma control | Daniel J. Hoffman, Matthew L. Miller, Heeyeop Chae, Michael Barnes, Tetsuya Ishikawa +1 more | 2005-02-08 |