Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6900596 | Capacitively coupled plasma reactor with uniform radial distribution of plasma | Jang-Gyoo Yang, Daniel J. Hoffman, James D. Carducci, Matthew L. Miller, Kang-Lie Chiang +2 more | 2005-05-31 |
| 6894245 | Merie plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression | Daniel J. Hoffman, Yan Ye, Dan Katz, Xiaoye Zhao, Kang-Lie Chiang +2 more | 2005-05-17 |