Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899111 | Configurable single substrate wet-dry integrated cluster cleaner | Paul Luscher, Siamak Salimian, Michael Welch | 2005-05-31 |
| 6900596 | Capacitively coupled plasma reactor with uniform radial distribution of plasma | Jang-Gyoo Yang, Daniel J. Hoffman, Douglas A. Buchberger, Jr., Matthew L. Miller, Kang-Lie Chiang +2 more | 2005-05-31 |
| 6863835 | Magnetic barrier for plasma in chamber exhaust | Hamid Noorbakhsh, Evans Lee, Hongqing Shan, Siamak Salimian, Paul Luscher +1 more | 2005-03-08 |