Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6913652 | Gas flow division in a wafer processing system having multiple chambers | — | 2005-07-05 |
| 6905624 | Interferometric endpoint detection in a substrate etching process | Coriolan Frum, Zhifeng Sui | 2005-06-14 |
| 6863835 | Magnetic barrier for plasma in chamber exhaust | James D. Carducci, Hamid Noorbakhsh, Evans Lee, Siamak Salimian, Paul Luscher +1 more | 2005-03-08 |
| 6849193 | Highly selective process for etching oxide over nitride using hexafluorobutadiene | Hoiman Hung, Joseph P. Caulfield, Ruiping Wang, Gerald Yin | 2005-02-01 |