Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6958112 | Methods and systems for high-aspect-ratio gapfill using atomic-oxygen generation | M. Ziaul Karim, Farhad Moghadam | 2005-10-25 |
| 6899111 | Configurable single substrate wet-dry integrated cluster cleaner | Paul Luscher, James D. Carducci, Michael Welch | 2005-05-31 |
| 6863835 | Magnetic barrier for plasma in chamber exhaust | James D. Carducci, Hamid Noorbakhsh, Evans Lee, Hongqing Shan, Paul Luscher +1 more | 2005-03-08 |