Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899111 | Configurable single substrate wet-dry integrated cluster cleaner | Paul Luscher, James D. Carducci, Siamak Salimian | 2005-05-31 |
| 6863835 | Magnetic barrier for plasma in chamber exhaust | James D. Carducci, Hamid Noorbakhsh, Evans Lee, Hongqing Shan, Siamak Salimian +1 more | 2005-03-08 |