Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6916399 | Temperature controlled window with a fluid supply system | Yan Rozenzon, Gil Lavi, Evans Lee, Dong Ho Choi, Matt Hamrah +3 more | 2005-07-12 |
| 6899111 | Configurable single substrate wet-dry integrated cluster cleaner | James D. Carducci, Siamak Salimian, Michael Welch | 2005-05-31 |
| 6863835 | Magnetic barrier for plasma in chamber exhaust | James D. Carducci, Hamid Noorbakhsh, Evans Lee, Hongqing Shan, Siamak Salimian +1 more | 2005-03-08 |