Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6958112 | Methods and systems for high-aspect-ratio gapfill using atomic-oxygen generation | Farhad Moghadam, Siamak Salimian | 2005-10-25 |
| 6903031 | In-situ-etch-assisted HDP deposition using SiF4 and hydrogen | Dongqing Li, Jeong Soo Byun, Thanh Pham | 2005-06-07 |
| 6844612 | Low dielectric constant fluorine-doped silica glass film for use in integrated circuit chips and method of forming the same | Jason Tian, Wenxian Zhu, Cong-Thanh DO | 2005-01-18 |