Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6905624 | Interferometric endpoint detection in a substrate etching process | Coriolan Frum, Hongqing Shan | 2005-06-14 |
ZS
Zhifeng Sui
Overall (2005): #67,225 of 245,428Top 30%
1
Patents 2005