Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6849193 | Highly selective process for etching oxide over nitride using hexafluorobutadiene | Hoiman Hung, Joseph P. Caulfield, Hongqing Shan, Gerald Yin | 2005-02-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6849193 | Highly selective process for etching oxide over nitride using hexafluorobutadiene | Hoiman Hung, Joseph P. Caulfield, Hongqing Shan, Gerald Yin | 2005-02-01 |