Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6921727 | Method for modifying dielectric characteristics of dielectric layers | Kang-Lie Chiang, Mahmoud Dahimene, Xiaoye Zhao, Yan Ye, Gerardo Delgadino +2 more | 2005-07-26 |
| 6849193 | Highly selective process for etching oxide over nitride using hexafluorobutadiene | Joseph P. Caulfield, Hongqing Shan, Ruiping Wang, Gerald Yin | 2005-02-01 |