Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6908862 | HDP-CVD dep/etch/dep process for improved deposition into high aspect ratio features | Dongqing Li, Lin Zhang | 2005-06-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6908862 | HDP-CVD dep/etch/dep process for improved deposition into high aspect ratio features | Dongqing Li, Lin Zhang | 2005-06-21 |