Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6939804 | Formation of composite tungsten films | Ken Kaung Lai, Jeong Soo Byun, Frederick Wu, Ramanujapuran A. Srinivas, Avgerinos V. Gelatos +7 more | 2005-09-06 |
| 6905737 | Method of delivering activated species for rapid cyclical deposition | Donald Verplancken | 2005-06-14 |
| 6893548 | Method of conditioning electrochemical baths in plating technology | Robin Cheung, Daniel Carl, Liang-Yuh Chen, Yezdi Dordi, Paul Smith +2 more | 2005-05-17 |
| 6890850 | Method of depositing dielectric materials in damascene applications | Ju-Hyung Lee, Ping Xu, Shankar Venkataraman, Li-Qun Xia, Fei Han +5 more | 2005-05-10 |
| 6849545 | System and method to form a composite film stack utilizing sequential deposition techniques | Alfred Mak, Mei Chang, Jeong Soo Byun, Hua Chung, Moris Kori | 2005-02-01 |