Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6905737 | Method of delivering activated species for rapid cyclical deposition | Ashok Sinha | 2005-06-14 |
| 6875271 | Simultaneous cyclical deposition in different processing regions | W. Benjamin Glenn | 2005-04-05 |