Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6929774 | Method and apparatus for heating and cooling substrates | Ratson Morad, Ho Seon Shin, Igor Kogan | 2005-08-16 |
| 6893548 | Method of conditioning electrochemical baths in plating technology | Daniel Carl, Liang-Yuh Chen, Yezdi Dordi, Paul Smith, Ratson Morad +2 more | 2005-05-17 |
| 6842659 | Method and apparatus for providing intra-tool monitoring and control | Suketu Arun Parikh | 2005-01-11 |