Issued Patents 2005
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979248 | Conductive polishing article for electrochemical mechanical polishing | Yongqi Hu, Yan Wang, Alain Duboust, Feng Q. Liu, Rashid Mavliev +2 more | 2005-12-27 |
| 6977036 | Method and apparatus for substrate polishing | Ralph Wadensweiler, Alain Duboust, Liang-Yuh Chen, Manoocher Birang, Paul D. Butterfield | 2005-12-20 |
| 6929774 | Method and apparatus for heating and cooling substrates | Ho Seon Shin, Robin Cheung, Igor Kogan | 2005-08-16 |
| 6897146 | System architecture of semiconductor manufacturing equipment | Ho Seon Shin | 2005-05-24 |
| 6896776 | Method and apparatus for electro-chemical processing | Wei-Yung Hsu, Liang-Yuh Chen, Daniel Carl, Sasson Somekh | 2005-05-24 |
| 6893548 | Method of conditioning electrochemical baths in plating technology | Robin Cheung, Daniel Carl, Liang-Yuh Chen, Yezdi Dordi, Paul Smith +2 more | 2005-05-17 |
| 6884724 | Method for dishing reduction and feature passivation in polishing processes | Wei-Yung Hsu, Liang-Yuh Chen, Daniel Carl | 2005-04-26 |
| 6841057 | Method and apparatus for substrate polishing | Ralph Wadensweiler, Alain Duboust, Liang-Yuh Chen, Manoocher Birang, Paul D. Butterfield | 2005-01-11 |