Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979248 | Conductive polishing article for electrochemical mechanical polishing | Yan Wang, Alain Duboust, Feng Q. Liu, Rashid Mavliev, Liang-Yuh Chen +2 more | 2005-12-27 |
| 6960521 | Method and apparatus for polishing metal and dielectric substrates | Yongsik Moon, David H. Mai, Kapila Wijekoon, Rajeev Bajaj, Rahul Surana +6 more | 2005-11-01 |