Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979248 | Conductive polishing article for electrochemical mechanical polishing | Yongqi Hu, Alain Duboust, Feng Q. Liu, Rashid Mavliev, Liang-Yuh Chen +2 more | 2005-12-27 |
| 6899804 | Electrolyte composition and treatment for electrolytic chemical mechanical polishing | Alain Duboust, Lizhong Sun, Feng Q. Liu, Yuchun Wang, Siew Neo +1 more | 2005-05-31 |
| 6837983 | Endpoint detection for electro chemical mechanical polishing and electropolishing processes | Alain Duboust, Siew Neo, Liang-Yuh Chen | 2005-01-04 |