Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6942546 | Endpoint detection for non-transparent polishing member | Mukesh Desai, Efrain Velazquez | 2005-09-13 |
| 6926589 | Chemical mechanical polishing apparatus and methods using a flexible pad and variable fluid flow for variable polishing | Douglas W. Young, Brett E. McGrath | 2005-08-09 |
| 6908374 | Chemical mechanical polishing endpoint detection | Bernard Frey, Bulent M. Basol, Douglas W. Young, Homayoun Talieh, Efrain Velazquez | 2005-06-21 |
| 6899804 | Electrolyte composition and treatment for electrolytic chemical mechanical polishing | Alain Duboust, Lizhong Sun, Feng Q. Liu, Yan Wang, Siew Neo +1 more | 2005-05-31 |
| 6872329 | Chemical mechanical polishing composition and process | Rajeev Bajaj, Fred C. Redeker, Shijian Li | 2005-03-29 |
| 6857947 | Advanced chemical mechanical polishing system with smart endpoint detection | Bernard Frey, Bulent M. Basol, Homayoun Talieh, Douglas W. Young, Brett E. McGrath +3 more | 2005-02-22 |