Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6942546 | Endpoint detection for non-transparent polishing member | Yuchun Wang, Efrain Velazquez | 2005-09-13 |
| 6857947 | Advanced chemical mechanical polishing system with smart endpoint detection | Yuchun Wang, Bernard Frey, Bulent M. Basol, Homayoun Talieh, Douglas W. Young +3 more | 2005-02-22 |