Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6967166 | Method for monitoring and controlling force applied on workpiece surface during electrochemical mechanical processing | Bulent M. Basol, Jeffrey Bogart | 2005-11-22 |
| 6942546 | Endpoint detection for non-transparent polishing member | Mukesh Desai, Yuchun Wang | 2005-09-13 |
| 6908368 | Advanced Bi-directional linear polishing system and method | Douglas W. Young, Vulf Perlov | 2005-06-21 |
| 6908374 | Chemical mechanical polishing endpoint detection | Yuchun Wang, Bernard Frey, Bulent M. Basol, Douglas W. Young, Homayoun Talieh | 2005-06-21 |
| 6857947 | Advanced chemical mechanical polishing system with smart endpoint detection | Yuchun Wang, Bernard Frey, Bulent M. Basol, Homayoun Talieh, Douglas W. Young +3 more | 2005-02-22 |