Issued Patents 2005
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6969456 | Method of using vertically configured chamber used for multiple processes | Konstantin Volodarsky, Boguslaw Nagorski, Rimma Volodarsky, Cyprian Emeka Uzoh, Homayoun Talieh | 2005-11-29 |
| 6939203 | Fluid bearing slide assembly for workpiece polishing | Homayoun Talieh | 2005-09-06 |
| 6932679 | Apparatus and method for loading a wafer in polishing system | Homayoun Talieh, Konstantin Volodarsky, Jalal Ashjaee | 2005-08-23 |
| 6926589 | Chemical mechanical polishing apparatus and methods using a flexible pad and variable fluid flow for variable polishing | Brett E. McGrath, Yuchun Wang | 2005-08-09 |
| 6908374 | Chemical mechanical polishing endpoint detection | Yuchun Wang, Bernard Frey, Bulent M. Basol, Homayoun Talieh, Efrain Velazquez | 2005-06-21 |
| 6908368 | Advanced Bi-directional linear polishing system and method | Vulf Perlov, Efrain Velazquez | 2005-06-21 |
| 6884334 | Vertically configured chamber used for multiple processes | Konstantin Volodarsky, Boguslaw A. Nigorski, Rimma Volodarsky, Cyprian Emeka Uzoh, Homayoun Talieh | 2005-04-26 |
| 6857947 | Advanced chemical mechanical polishing system with smart endpoint detection | Yuchun Wang, Bernard Frey, Bulent M. Basol, Homayoun Talieh, Brett E. McGrath +3 more | 2005-02-22 |