Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6908374 | Chemical mechanical polishing endpoint detection | Yuchun Wang, Bulent M. Basol, Douglas W. Young, Homayoun Talieh, Efrain Velazquez | 2005-06-21 |
| 6857947 | Advanced chemical mechanical polishing system with smart endpoint detection | Yuchun Wang, Bulent M. Basol, Homayoun Talieh, Douglas W. Young, Brett E. McGrath +3 more | 2005-02-22 |