Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960521 | Method and apparatus for polishing metal and dielectric substrates | Yongsik Moon, David H. Mai, Kapila Wijekoon, Rahul Surana, Yongqi Hu +6 more | 2005-11-01 |
| 6911136 | Method for regulating the electrical power applied to a substrate during an immersion process | Bo Zheng, Zhonghui Wang | 2005-06-28 |
| 6872329 | Chemical mechanical polishing composition and process | Yuchun Wang, Fred C. Redeker, Shijian Li | 2005-03-29 |
| 6869332 | Chemical mechanical polishing of a metal layer with polishing rate monitoring | Fred C. Redeker | 2005-03-22 |