Issued Patents 2005
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960521 | Method and apparatus for polishing metal and dielectric substrates | Yongsik Moon, David H. Mai, Kapila Wijekoon, Rajeev Bajaj, Rahul Surana +6 more | 2005-11-01 |
| 6955516 | Single wafer dryer and drying methods | Younes Achkire, Alexander Lerner, Boris Govzman, Boris Fishkin, Michael Sugarman +4 more | 2005-10-18 |
| 6887129 | Chemical mechanical polishing with friction-based control | Manoocher Birang | 2005-05-03 |
| 6872329 | Chemical mechanical polishing composition and process | Yuchun Wang, Rajeev Bajaj, Fred C. Redeker | 2005-03-29 |
| 6863794 | Method and apparatus for forming metal layers | Stan Tsai | 2005-03-08 |
| 6863593 | Chemical mechanical polishing a substrate having a filler layer and a stop layer | Raymond R. Jin, Fred C. Redeker, Thomas H. Osterheld | 2005-03-08 |
| 6858265 | Technique for improving chucking reproducibility | Fred C. Redeker, Robert Steger | 2005-02-22 |
| 6858540 | Selective removal of tantalum-containing barrier layer during metal CMP | Lizhong Sun, Stan Tsai, Fred C. Redeker | 2005-02-22 |