Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6955516 | Single wafer dryer and drying methods | Younes Achkire, Boris Govzman, Boris Fishkin, Michael Sugarman, Rashid Mavliev +4 more | 2005-10-18 |
| 6918864 | Roller that avoids substrate slippage | Brian J. Brown, Michael Sugarman, Makoto Inagawa, Daniel Ramar | 2005-07-19 |
| 6865937 | Deionized water spray on loss of fluid processing tank exhaust | Harshad Borgaonkar | 2005-03-15 |