Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6955516 | Single wafer dryer and drying methods | Younes Achkire, Alexander Lerner, Boris Govzman, Boris Fishkin, Rashid Mavliev +4 more | 2005-10-18 |
| 6921494 | Backside etching in a scrubber | Brian J. Brown, Madhavi R. Chandrachood, Radha Nayak, Fred C. Redeker, John M. White | 2005-07-26 |
| 6918864 | Roller that avoids substrate slippage | Brian J. Brown, Makoto Inagawa, Daniel Ramar, Alexander Lerner | 2005-07-19 |
| 6904637 | Scrubber with sonic nozzle | — | 2005-06-14 |