Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6921494 | Backside etching in a scrubber | Brian J. Brown, Madhavi R. Chandrachood, Radha Nayak, Fred C. Redeker, Michael Sugarman | 2005-07-26 |
| 6887776 | Methods to form metal lines using selective electrochemical deposition | Quanyuan Shang, Robert Z. Bachrach, Kam S. Law | 2005-05-03 |
| 6847730 | Automated substrate processing system | Emanuel Beer | 2005-01-25 |
| 6837779 | Chemical mechanical polisher with grooved belt | Christopher Wayne Smith | 2005-01-04 |