Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6902682 | Method and apparatus for electrostatically maintaining substrate flatness | Quanyuan Shang, Robert Robertson, James T. Gardner | 2005-06-07 |
| 6887776 | Methods to form metal lines using selective electrochemical deposition | Quanyuan Shang, John M. White, Robert Z. Bachrach | 2005-05-03 |
| 6880561 | Fluorine process for cleaning semiconductor process chamber | Haruhiro Harry Goto, William Harshbarger, Quanyuan Shang | 2005-04-19 |
| 6869838 | Deposition of passivation layers for active matrix liquid crystal display (AMLCD) applications | Quanyuan Shang, William Harshbarger, Dan Maydan | 2005-03-22 |
| 6857387 | Multiple frequency plasma chamber with grounding capacitor at cathode | Sheng Sun, Jeff Olsen, Sanjay Yadav, Quanyuan Shang | 2005-02-22 |
| 6843258 | On-site cleaning gas generation for process chamber cleaning | Quanyuan Shang, Sanjay Yadav, William Harshbarger | 2005-01-18 |