Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960263 | Shadow frame with cross beam for semiconductor equipment | Sakae Tanaka, Qunhua Wang, Quanyuan Shang, William Harshbarger | 2005-11-01 |
| 6896929 | Susceptor shaft vacuum pumping | Quanyuan Shang, Ernst Keller, Wei-Line Chang | 2005-05-24 |
| 6857387 | Multiple frequency plasma chamber with grounding capacitor at cathode | Sheng Sun, Jeff Olsen, Quanyuan Shang, Kam S. Law | 2005-02-22 |
| 6843258 | On-site cleaning gas generation for process chamber cleaning | Quanyuan Shang, William Harshbarger, Kam S. Law | 2005-01-18 |