Issued Patents 2005
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6962732 | Process for controlling thin film uniformity and products produced thereby | Tae Kyung Won, Takako Takehara | 2005-11-08 |
| 6960263 | Shadow frame with cross beam for semiconductor equipment | Sakae Tanaka, Qunhua Wang, Sanjay Yadav, Quanyuan Shang | 2005-11-01 |
| 6880561 | Fluorine process for cleaning semiconductor process chamber | Haruhiro Harry Goto, Quanyuan Shang, Kam S. Law | 2005-04-19 |
| 6869838 | Deposition of passivation layers for active matrix liquid crystal display (AMLCD) applications | Kam S. Law, Quanyuan Shang, Dan Maydan | 2005-03-22 |
| 6863077 | Method and apparatus for enhanced chamber cleaning | Sheng Sun, Quanyuan Shang, Robert I. Greene | 2005-03-08 |
| 6858548 | Application of carbon doped silicon oxide film to flat panel industry | Tae Kyung Won, Quanyuan Shang | 2005-02-22 |
| 6843258 | On-site cleaning gas generation for process chamber cleaning | Quanyuan Shang, Sanjay Yadav, Kam S. Law | 2005-01-18 |