Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6863077 | Method and apparatus for enhanced chamber cleaning | Quanyuan Shang, William Harshbarger, Robert I. Greene | 2005-03-08 |
| 6857387 | Multiple frequency plasma chamber with grounding capacitor at cathode | Jeff Olsen, Sanjay Yadav, Quanyuan Shang, Kam S. Law | 2005-02-22 |