Issued Patents 2005
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960263 | Shadow frame with cross beam for semiconductor equipment | Sakae Tanaka, Qunhua Wang, Sanjay Yadav, William Harshbarger | 2005-11-01 |
| 6942753 | Gas distribution plate assembly for large area plasma enhanced chemical vapor deposition | Soo Young Choi, Robert I. Greene, Li Hou | 2005-09-13 |
| 6902682 | Method and apparatus for electrostatically maintaining substrate flatness | Robert Robertson, Kam S. Law, James T. Gardner | 2005-06-07 |
| 6896929 | Susceptor shaft vacuum pumping | Sanjay Yadav, Ernst Keller, Wei-Line Chang | 2005-05-24 |
| 6887776 | Methods to form metal lines using selective electrochemical deposition | John M. White, Robert Z. Bachrach, Kam S. Law | 2005-05-03 |
| 6880561 | Fluorine process for cleaning semiconductor process chamber | Haruhiro Harry Goto, William Harshbarger, Kam S. Law | 2005-04-19 |
| 6869838 | Deposition of passivation layers for active matrix liquid crystal display (AMLCD) applications | Kam S. Law, William Harshbarger, Dan Maydan | 2005-03-22 |
| 6863077 | Method and apparatus for enhanced chamber cleaning | Sheng Sun, William Harshbarger, Robert I. Greene | 2005-03-08 |
| 6858548 | Application of carbon doped silicon oxide film to flat panel industry | Tae Kyung Won, William Harshbarger | 2005-02-22 |
| 6857387 | Multiple frequency plasma chamber with grounding capacitor at cathode | Sheng Sun, Jeff Olsen, Sanjay Yadav, Kam S. Law | 2005-02-22 |
| 6843258 | On-site cleaning gas generation for process chamber cleaning | Sanjay Yadav, William Harshbarger, Kam S. Law | 2005-01-18 |