Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6857387 | Multiple frequency plasma chamber with grounding capacitor at cathode | Sheng Sun, Sanjay Yadav, Quanyuan Shang, Kam S. Law | 2005-02-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6857387 | Multiple frequency plasma chamber with grounding capacitor at cathode | Sheng Sun, Sanjay Yadav, Quanyuan Shang, Kam S. Law | 2005-02-22 |