Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6896929 | Susceptor shaft vacuum pumping | Sanjay Yadav, Quanyuan Shang, Ernst Keller | 2005-05-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6896929 | Susceptor shaft vacuum pumping | Sanjay Yadav, Quanyuan Shang, Ernst Keller | 2005-05-24 |