Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6942753 | Gas distribution plate assembly for large area plasma enhanced chemical vapor deposition | Soo Young Choi, Quanyuan Shang, Robert I. Greene | 2005-09-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6942753 | Gas distribution plate assembly for large area plasma enhanced chemical vapor deposition | Soo Young Choi, Quanyuan Shang, Robert I. Greene | 2005-09-13 |