Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6942753 | Gas distribution plate assembly for large area plasma enhanced chemical vapor deposition | Soo Young Choi, Quanyuan Shang, Li Hou | 2005-09-13 |
| 6863077 | Method and apparatus for enhanced chamber cleaning | Sheng Sun, Quanyuan Shang, William Harshbarger | 2005-03-08 |