Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6919054 | Reactant nozzles within flowing reactors | Ronald J. Mosso, James A. Gilliam | 2005-07-19 |
| 6902682 | Method and apparatus for electrostatically maintaining substrate flatness | Quanyuan Shang, Robert Robertson, Kam S. Law | 2005-06-07 |
| 6881276 | Detecting the endpoint of a chamber cleaning | Wendell T. Blonigan | 2005-04-19 |
| 6849334 | Optical materials and optical devices | Craig R. Horne, Pierre J. DeMascarel, Christian C. Honeker, Benjamin Chaloner-Gill, Herman A. Lopez +9 more | 2005-02-01 |