Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949143 | Dual substrate loadlock process equipment | Shinichi Kurita, Akihiro Hosokawa | 2005-09-27 |
| 6916147 | Substrate storage cassette with substrate alignment feature | Dongchoon Suh, Rolf Guenther | 2005-07-12 |
| 6896513 | Large area substrate processing system | Robert Z. Bachrach | 2005-05-24 |
| 6881276 | Detecting the endpoint of a chamber cleaning | James T. Gardner | 2005-04-19 |