Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6977788 | Method and apparatus for adjusting angular position of magnetic head unit | Satoshi Yamaguchi, Makoto Ohashi, Mitsuo Hayashi | 2005-12-20 |
| 6949143 | Dual substrate loadlock process equipment | Shinichi Kurita, Wendell T. Blonigan | 2005-09-27 |
| 6936797 | Thermal processing method and thermal processing apparatus for substrate employing photoirradiation | — | 2005-08-30 |
| 6917755 | Substrate support | Andrew Nguyen, Gerhard Schneider, Takayuki Matsumoto | 2005-07-12 |