Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6962644 | Tandem etch chamber plasma processing system | Alexander Paterson, Valentin Todorov, Jon McChesney, David Palagashvili, John Holland +1 more | 2005-11-08 |
| 6917755 | Substrate support | Andrew Nguyen, Akihiro Hosokawa, Takayuki Matsumoto | 2005-07-12 |