Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6962644 | Tandem etch chamber plasma processing system | Alexander Paterson, Jon McChesney, Gerhard Schneider, David Palagashvili, John Holland +1 more | 2005-11-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6962644 | Tandem etch chamber plasma processing system | Alexander Paterson, Jon McChesney, Gerhard Schneider, David Palagashvili, John Holland +1 more | 2005-11-08 |